Roger B. Lachenbruch

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Petaluma, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Modular article processing machine and method of article handling t...
- Patent number 4,801,241
- Issue date Jan 31, 1989
- Tegal Corporation
- John Zajac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically coupled wafer lift pins
- Patent number 4,790,258
- Issue date Dec 13, 1988
- Tegal Corporation
- David J. Drage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Xenon enhanced plasma etch
- Patent number 4,786,359
- Issue date Nov 22, 1988
- Tegal Corporation
- Mark M. Stark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic wafer clamp
- Patent number 4,724,510
- Issue date Feb 9, 1988
- Tegal Corporation
- Thomas E. Wicker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport apparatus
- Patent number 4,619,573
- Issue date Oct 28, 1986
- Tegal Corporation
- Thomas M. Rathmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic shutoff valve
- Patent number 4,547,248
- Issue date Oct 15, 1985
- Tegal Corporation
- Roger B. Lachenbruch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...