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Wafer carrier track
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Patent number 9,169,554
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Issue date Oct 27, 2015
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Alta Devices, Inc.
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Gang He
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer carrier track
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Patent number 8,985,911
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Issue date Mar 24, 2015
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Alta Devices, Inc.
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Gang He
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Methods for heating with lamps
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Patent number 8,859,042
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Issue date Oct 14, 2014
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Alta Devices, Inc.
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Gang He
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for vapor deposition
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Patent number 8,852,696
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Issue date Oct 7, 2014
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Alta Devices, Inc.
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Gang He
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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