Rogier Herman Mathijs Groeneveld

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Eindhoven, NL

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Patents Applicationslast 30 patents

Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20110122389
- Publication date May 26, 2011
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080074629
- Publication date Mar 27, 2008
- ASML NETHERLANDS B.V.
- Rogier Herman Mathijs Groeneveld
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY