Rogier H.M. Groeneveld

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,908,144
- Issue date Dec 9, 2014
- ASML Netherlands B.V.
- Rogier Herman Mathijs Groeneveld
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Abbe arm calibration system for use in lithographic apparatus
- Patent number 6,730,920
- Issue date May 4, 2004
- ASML Netherlands B.V.
- Rogier H. M. Groeneveld
- F41 - WEAPONS

Patents Applicationslast 30 patents

Information Patent Application
Abbe arm calibration system for use in lithographic apparatus
- Publication number 20040184018
- Publication date Sep 23, 2004
- ASML NETHERLANDS B.V.
- Rogier H.M. Groeneveld
- F41 - WEAPONS
Information Patent Application
Abbe arm calibration system for use in lithographic apparatus
- Publication number 20010008273
- Publication date Jul 19, 2001
- Rogier H.M. Groeneveld
- F41 - WEAPONS