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Rogier Martin Lambert Ellenbroek
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Delfgauw, NL
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last 30 patents
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Patent Grant
Vibration isolation module and substrate processing system
Patent number
8,905,369
Issue date
Dec 9, 2014
Mapper Lithography IP B.V.
Jerry Johannes Martinus Peijster
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM
Publication number
20140197330
Publication date
Jul 17, 2014
MAPPER LITHOGRAPHY IP BV
Jerry Johannes Martinus Peijster
B82 - NANO-TECHNOLOGY