Rohit Khare

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 11,365,479
- Issue date Jun 21, 2022
- Lam Research Corporation
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 10,760,158
- Issue date Sep 1, 2020
- Lam Research Corporation
- Damodar Shanbhag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten nitride barrier layer deposition
- Patent number 10,199,267
- Issue date Feb 5, 2019
- Lam Research Corporation
- Rohit Khare
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FEATURE FILL WITH NUCLEATION INHIBITION
- Publication number 20230122846
- Publication date Apr 20, 2023
- LAM RESEARCH CORPORATION
- Rohit KHARE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230002891
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20220275504
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Damodar Rajaram SHANBHAG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20200347497
- Publication date Nov 5, 2020
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
- Publication number 20190185999
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Damodar Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN NITRIDE BARRIER LAYER DEPOSITION
- Publication number 20190006226
- Publication date Jan 3, 2019
- LAM RESEARCH CORPORATION
- Rohit Khare
- H01 - BASIC ELECTRIC ELEMENTS

Rohit Khare

Person

Patents Grantslast 30 patents

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Ex situ coating of chamber components for semiconductor processing

Tungsten nitride barrier layer deposition

Patents Applicationslast 30 patents

FEATURE FILL WITH NUCLEATION INHIBITION

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

TUNGSTEN NITRIDE BARRIER LAYER DEPOSITION