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Roland Hedrich
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Ehringshausen, DE
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for the optical inspection of wafers
Patent number
8,451,440
Issue date
May 28, 2013
KLA-Tencor MIE GmbH
Kurt Hahn
G01 - MEASURING TESTING
Information
Patent Grant
Microscope
Patent number
6,473,230
Issue date
Oct 29, 2002
Leica Microsystems Wetzlar GmbH
Roland Hedrich
G02 - OPTICS
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Patent Grant
Microscope stand for a wafer inspection microscope
Patent number
6,236,503
Issue date
May 22, 2001
Leica Microsystems Wetzlar GmbH
Ulrich Kaczynski
G02 - OPTICS
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Patent Grant
Limit switching apparatus with defined overtravel for specimen prot...
Patent number
5,315,080
Issue date
May 24, 1994
Leica Mikroskopie und Systems GmbH
Ulrich Kaczynski
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Apparatus for the Optical Inspection of Wafers
Publication number
20100295938
Publication date
Nov 25, 2010
KLA-TENCOR MIE GMBH
Kurt Hahn
G01 - MEASURING TESTING
Information
Patent Application
Microscope
Publication number
20020135870
Publication date
Sep 26, 2002
Leica Microsystems Wetzlar GmbH
Roland Hedrich
G02 - OPTICS