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Roland LOERCHER
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Aalen-Hofherrnweiler, DE
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Patents Grants
last 30 patents
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Patent Grant
Mirror for the EUV wavelength range, substrate for such a mirror, p...
Patent number
9,494,718
Issue date
Nov 15, 2016
Carl Zeiss SMT GmbH
Stephan Muellender
B82 - NANO-TECHNOLOGY
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Patent Grant
Micromirror arrangement having a coating and method for the product...
Patent number
8,928,980
Issue date
Jan 6, 2015
Carl Zeiss SMT GmbH
Karl-Stefan Weissenrieder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
MIRROR FOR THE EUV WAVELENGTH RANGE, SUBSTRATE FOR SUCH A MIRROR, P...
Publication number
20130038929
Publication date
Feb 14, 2013
Carl Zeiss SMT GMBH
Stephan MUELLENDER
B82 - NANO-TECHNOLOGY
Information
Patent Application
MICROMIRROR ARRANGEMENT HAVING A COATING AND METHOD FOR THE PRODUCT...
Publication number
20120182606
Publication date
Jul 19, 2012
Carl Zeiss SMT GMBH
Karl-Stefan WEISSENRIEDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY