Roland Mader

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Altusried, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for the production of process gas that include...
- Patent number 7,144,826
- Issue date Dec 5, 2006
- Mattson Thermal Products
- Georg Roters
- F22 - STEAM GENERATION
Information Patent Grant
Device and method for thermally treating substrates
- Patent number 6,614,005
- Issue date Sep 2, 2003
- Steag RTP Systems GmbH
- Heinrich Walk
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of oxidation of semiconductor wafers in a rapid thermal proc...
- Patent number 5,935,650
- Issue date Aug 10, 1999
- Wilfried Lerch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for the production of process gases
- Publication number 20040137754
- Publication date Jul 15, 2004
- Georg Roters
- F22 - STEAM GENERATION