Rolf A. Guenther

Person

Monte Sereno, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating a heated substrate support
- Patent number 8,065,789
- Issue date Nov 29, 2011
- Applied Materials, Inc.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated substrate support and method of fabricating same
- Patent number 7,674,338
- Issue date Mar 9, 2010
- Applied Materials, Inc.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Upper chamber for high density plasma CVD
- Patent number 7,354,501
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for providing gas to a processing chamber
- Patent number 7,294,208
- Issue date Nov 13, 2007
- Applied Materials, Inc.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma CVD chamber
- Patent number 7,074,298
- Issue date Jul 11, 2006
- Applied Materials
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating gas to a processing chamber
- Patent number 6,915,592
- Issue date Jul 12, 2005
- Applied Materials, Inc.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate storage cassette with substrate alignment feature
- Patent number 6,916,147
- Issue date Jul 12, 2005
- Applied Materials, Inc.
- Dongchoon Suh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated method for release and passivation of MEMS structures
- Patent number 6,902,947
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching variable depth features in a crystalline substrate
- Patent number 6,900,133
- Issue date May 31, 2005
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated method for release and passivation of MEMS structures
- Patent number 6,830,950
- Issue date Dec 14, 2004
- Applied Materials, Inc.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature controlled dome-coil system for high power inductively...
- Patent number 6,822,185
- Issue date Nov 23, 2004
- Applied Materials, Inc.
- Michael Welch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed-loop dome thermal control apparatus for a semiconductor wafe...
- Patent number 6,367,410
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Patrick Leahey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having a thermal transfer regulator pad
- Patent number 5,978,202
- Issue date Nov 2, 1999
- Applied Materials, Inc.
- Ralph M. Wadensweiler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for measuring pedestal temperature in a semiconductor waf...
- Patent number 5,893,643
- Issue date Apr 13, 1999
- Applied Materials, Inc.
- Ajay Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching transistor gates using a hardmask
- Patent number 5,851,926
- Issue date Dec 22, 1998
- Applied Materials, Inc.
- Ajay Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a joint between a tubular composite and a metal ring
- Patent number 4,701,231
- Issue date Oct 20, 1987
- Westinghouse Electric Corp.
- Stanley T. Peters
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Surface Coating
- Publication number 20100080957
- Publication date Apr 1, 2010
- Integrated Surface Technologies
- Jeffrey D. CHINN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
HEATED SUBSTRATE SUPPORT AND METHOD OF FABRICATING SAME
- Publication number 20080271309
- Publication date Nov 6, 2008
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High density plasma CVD chamber
- Publication number 20060191478
- Publication date Aug 31, 2006
- Applied Materials, Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated substrate support and method of fabricating same
- Publication number 20060075971
- Publication date Apr 13, 2006
- APPLIED MATERIALS, INC.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated substrate support and method of fabricating same
- Publication number 20060075970
- Publication date Apr 13, 2006
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for providing gas to a processing chamber
- Publication number 20050257735
- Publication date Nov 24, 2005
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate carrier for processing substrates
- Publication number 20050241771
- Publication date Nov 3, 2005
- APPLIED MATERIALS, INC.
- Michael B. Rattner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Disposable barrier technique for through wafer etching in MEMS
- Publication number 20040087054
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Substrate storage cassette with substrate alignment feature
- Publication number 20040081547
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Dongchoon Suh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature controlled dome-coil system for high power inductively...
- Publication number 20040065645
- Publication date Apr 8, 2004
- Applied Materials, Inc.
- Michael Welch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of etching variable depth features in a crystalline substrate
- Publication number 20040053505
- Publication date Mar 18, 2004
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated method for release and passivation of MEMS structures
- Publication number 20040033639
- Publication date Feb 19, 2004
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for generating gas to a processing chamber
- Publication number 20040025370
- Publication date Feb 12, 2004
- APPLIED MATERIALS, INC.
- Rolf A. Guenther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate carrier for processing substrates
- Publication number 20030219986
- Publication date Nov 27, 2003
- APPLIED MATERIALS, INC.
- Michael B. Rattner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support assembly having an edge protector
- Publication number 20030217693
- Publication date Nov 27, 2003
- APPLIED MATERIALS, INC.
- Michael B. Rattner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Upper chamber for high density plasma CVD
- Publication number 20030213434
- Publication date Nov 20, 2003
- Applied Materials, Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High density plasma CVD chamber
- Publication number 20030213562
- Publication date Nov 20, 2003
- Applied Materials, Inc.
- Sudhir Gondhalekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated method for release and passivation of MEMS structures
- Publication number 20030166342
- Publication date Sep 4, 2003
- APPLIED MATERIALS, INC.
- Jeffrey D. Chinn
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Rolf A. Guenther

Person

Patents Grantslast 30 patents

Method of fabricating a heated substrate support

Heated substrate support and method of fabricating same

Upper chamber for high density plasma CVD

Apparatus for providing gas to a processing chamber

High density plasma CVD chamber

Method and apparatus for generating gas to a processing chamber

Substrate storage cassette with substrate alignment feature

Integrated method for release and passivation of MEMS structures

Method of etching variable depth features in a crystalline substrate

Integrated method for release and passivation of MEMS structures

Temperature controlled dome-coil system for high power inductively...

Closed-loop dome thermal control apparatus for a semiconductor wafe...

Electrostatic chuck having a thermal transfer regulator pad

Apparatus for measuring pedestal temperature in a semiconductor waf...

Method for etching transistor gates using a hardmask

Method of forming a joint between a tubular composite and a metal ring

Patents Applicationslast 30 patents

Surface Coating

HEATED SUBSTRATE SUPPORT AND METHOD OF FABRICATING SAME

High density plasma CVD chamber

Heated substrate support and method of fabricating same

Heated substrate support and method of fabricating same

Method and apparatus for providing gas to a processing chamber

Substrate carrier for processing substrates

Disposable barrier technique for through wafer etching in MEMS

Substrate storage cassette with substrate alignment feature

Temperature controlled dome-coil system for high power inductively...

Method of etching variable depth features in a crystalline substrate

Integrated method for release and passivation of MEMS structures

Method and apparatus for generating gas to a processing chamber

Substrate carrier for processing substrates

Substrate support assembly having an edge protector

Upper chamber for high density plasma CVD

High density plasma CVD chamber

Integrated method for release and passivation of MEMS structures