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Roman Forke
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Chemnitz, DE
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last 30 patents
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Patent Grant
Micromechanical system and method for building a micromechanical sy...
Patent number
8,887,568
Issue date
Nov 18, 2014
Siemens Aktiengesellschaft
Roman Forke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibrating micromechanical system having beam-shaped element
Patent number
8,887,571
Issue date
Nov 18, 2014
Siemens Aktiengesellschaft
Marco Dienel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
Publication number
20210147223
Publication date
May 20, 2021
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Roman Forke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SYSTEM AND METHOD FOR BUILDING A MICROMECHANICAL SY...
Publication number
20120024066
Publication date
Feb 2, 2012
Roman Forke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIBRATING MICROMECHANICAL SYSTEM HAVING BEAM-SHAPED ELEMENT
Publication number
20120017683
Publication date
Jan 26, 2012
Marco Dienel
B81 - MICRO-STRUCTURAL TECHNOLOGY