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Villach, AT
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last 30 patents
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Patent Grant
Device for holding wafer shaped articles
Patent number
9,130,002
Issue date
Sep 8, 2015
Lam Research AG
Dieter Frank
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DEVICE FOR HOLDING WAFER SHAPED ARTICLES
Publication number
20110272874
Publication date
Nov 10, 2011
LAM RESEARCH AG
Dieter FRANK
H01 - BASIC ELECTRIC ELEMENTS