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Roman Klein
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Berlin, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical measurement device
Patent number
10,627,336
Issue date
Apr 21, 2020
Hach Lange GmbH
Frank Steinhauer
G01 - MEASURING TESTING
Information
Patent Grant
Device, EUV lithographic device and method for preventing and clean...
Patent number
7,462,842
Issue date
Dec 9, 2008
Carl Zeiss SMT AG
Marco E. Wedowski
B08 - CLEANING
Information
Patent Grant
Optical element and method for its manufacture as well as lithograp...
Patent number
7,172,788
Issue date
Feb 6, 2007
Carl Zeiss SMT AG
Andrey E. Yakshin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Device, EUV-lithographic device and method for preventing and clean...
Patent number
7,060,993
Issue date
Jun 13, 2006
Carl Zeiss SMT AG
Marco E. Wedowski
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL MEASUREMENT DEVICE
Publication number
20190265156
Publication date
Aug 29, 2019
Frank Steinhauer
G01 - MEASURING TESTING
Information
Patent Application
Device, EUV lithographic device and method for preventing and clean...
Publication number
20060192158
Publication date
Aug 31, 2006
Marco E. Wedowski
B08 - CLEANING
Information
Patent Application
Device, euv-lithographic device and method for preventing and clean...
Publication number
20050104015
Publication date
May 19, 2005
Marco Wedowski
B08 - CLEANING