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Roman Knofler
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Gersdorf, DE
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last 30 patents
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Patent Grant
Microstructure and method for the production thereof
Patent number
6,969,628
Issue date
Nov 29, 2005
memsfab GmbH
Andreas Bertz
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Microstructure and method for the production thereof
Publication number
20030176007
Publication date
Sep 18, 2003
Andreas Bertz
B81 - MICRO-STRUCTURAL TECHNOLOGY