Ron S. Serisky

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Melrose, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced substrate temperature measurement apparatus, system and me...
- Patent number 11,473,978
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Carbon nanotube electrostatic chuck
- Patent number 11,069,554
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CARBON NANOTUBE ELECTROSTATIC CHUCK
- Publication number 20210225682
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
- Publication number 20200381271
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
- Publication number 20200378837
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Application
IN-VACUUM PROTECTIVE LINERS
- Publication number 20090179158
- Publication date Jul 16, 2009
- VARIAN SEMICONDUCTOR EQUPIMENT ASSOCIATE, INC.
- Lyudmila Stone
- H01 - BASIC ELECTRIC ELEMENTS