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Ronald Koster
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Wijchen, NL
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Patents Grants
last 30 patents
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Patent Grant
Etching with improved control of critical feature dimensions at the...
Patent number
8,282,845
Issue date
Oct 9, 2012
EPCOS AG
Dirk Marteen Knotter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing a MEMS element having cantilever and cavity on a subs...
Patent number
8,097,483
Issue date
Jan 17, 2012
EPCOS AG
Robertus T. F. Van Schaijk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBS...
Publication number
20100264498
Publication date
Oct 21, 2010
EPCOS AG
Robertus T. F. Van Schaijk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Etching with Improved Control of Critical Feature Dimensions at the...
Publication number
20090298293
Publication date
Dec 3, 2009
Dirk Marteen Knotter
B81 - MICRO-STRUCTURAL TECHNOLOGY