Ronald L. Kinder

Follow

Person

Urbana, IL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for enhancing plasma processing of a semiconduc...
- Patent number 6,706,142
- Issue date Mar 16, 2004
- Mattson Technology, Inc.
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Systems and methods for enhancing plasma processing of a semiconduc...
- Publication number 20020096258
- Publication date Jul 25, 2002
- Stephen E. Savas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...