Ronald N. Reece

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Westwood, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
In-situ wafer temperature measurement and control
- Patent number 10,903,097
- Issue date Jan 26, 2021
- Axcelis Technologies, Inc.
- John F. Baggett
- G01 - MEASURING TESTING
Information Patent Grant
Implant-induced damage control in ion implantation
- Patent number 9,490,185
- Issue date Nov 8, 2016
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods that mitigate contamination and modify surface...
- Patent number 7,511,287
- Issue date Mar 31, 2009
- Axcelis Technologies, Inc.
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam incident angle detector for ion implant systems
- Patent number 6,828,572
- Issue date Dec 7, 2004
- Axcelis Technologies, Inc.
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL
- Publication number 20190304820
- Publication date Oct 3, 2019
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANT-INDUCED DAMAGE CONTROL IN ION IMPLANTATION
- Publication number 20140065730
- Publication date Mar 6, 2014
- Axcelis Technologies, Inc.
- Ronald N. Reece
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and methods that mitigate contamination and modify surface...
- Publication number 20070075274
- Publication date Apr 5, 2007
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM INCIDENT ANGLE DETECTOR FOR ION IMPLANT SYSTEMS
- Publication number 20040195528
- Publication date Oct 7, 2004
- Ronald N. Reece
- H01 - BASIC ELECTRIC ELEMENTS