Ronald Van Der Ham

Person

Maarheez, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid handling system and lithographic apparatus
- Patent number 12,072,636
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 11,300,890
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of transferring a substrate and devi...
- Patent number 10,916,453
- Issue date Feb 9, 2021
- ASML Netherlands B.V.
- Aart Adrianus Van Beuzekom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 10,859,919
- Issue date Dec 8, 2020
- ASML Netherlands B.V.
- Cornelius Maria Rops
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 10,551,748
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Cornelius Maria Rops
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 10,520,837
- Issue date Dec 31, 2019
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of transferring a substrate and devi...
- Patent number 10,409,174
- Issue date Sep 10, 2019
- ASML Netherlands B.V.
- Aart Adrianus Van Beuzekom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and a method of manufacturing a lithographic...
- Patent number 10,324,384
- Issue date Jun 18, 2019
- ASML Netherlands B.V.
- Gerben Pieterse
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,268,127
- Issue date Apr 23, 2019
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 10,222,707
- Issue date Mar 5, 2019
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus and device manufacturing method
- Patent number 10,001,712
- Issue date Jun 19, 2018
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 9,904,177
- Issue date Feb 27, 2018
- ASML Netherlands B.V.
- Ivo Adam Johannes Thomas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 9,897,928
- Issue date Feb 20, 2018
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,645,506
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 9,274,436
- Issue date Mar 1, 2016
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 9,195,147
- Issue date Nov 24, 2015
- ASML Netherlands B.V.
- Koen Steffens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 8,711,326
- Issue date Apr 29, 2014
- ASML Netherlands B.V.
- Ronald Van Der Ham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,681,308
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Paul Petrus Joannes Berkvens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas manifold, module for a lithographic apparatus, lithographic app...
- Patent number 8,675,169
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Frank Johannes Jacobus Van Boxtel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,634,053
- Issue date Jan 21, 2014
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 8,472,003
- Issue date Jun 25, 2013
- ASML Netherlands B.V.
- Hrishikesh Patel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Assembly comprising a conditioning system and at least one object,...
- Patent number 8,441,610
- Issue date May 14, 2013
- ASML Netherlands B.V.
- Ronald Van Der Ham
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,279,396
- Issue date Oct 2, 2012
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus and device manufacturing method
- Patent number 8,259,283
- Issue date Sep 4, 2012
- ASML Netherlands B.V.
- Daniël Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,218,126
- Issue date Jul 10, 2012
- ASML Netherlands B.V.
- Koen Steffens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,149,379
- Issue date Apr 3, 2012
- ASML Netherlands B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly comprising a conditioning system and at least one object,...
- Patent number 7,924,399
- Issue date Apr 12, 2011
- ASML Netherlands B.V.
- Ronald Van Der Ham
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithographic apparatus and method for conditioning an interior spac...
- Patent number 7,728,951
- Issue date Jun 1, 2010
- ASML Netherlands B.V.
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having parts with a coated film adhered thereto
- Patent number 7,561,250
- Issue date Jul 14, 2009
- ASML Netherlands B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas shower, lithographic apparatus and use of a gas shower
- Patent number 7,432,513
- Issue date Oct 7, 2008
- ASML Netherlands B.V.
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS
- Publication number 20240411233
- Publication date Dec 12, 2024
- ASML NETHERLANDS B.V.
- Gosse Charles DE VRIES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20240192607
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20210088912
- Publication date Mar 25, 2021
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20200166851
- Publication date May 28, 2020
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
- Publication number 20200124993
- Publication date Apr 23, 2020
- AS ML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...
- Publication number 20190391499
- Publication date Dec 26, 2019
- ASML NETHERLANDS B.V.
- Aart Adrianus VAN BEUZEKOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic apparatus, support table for a lithographic apparatus...
- Publication number 20180284627
- Publication date Oct 4, 2018
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...
- Publication number 20180210350
- Publication date Jul 26, 2018
- ASML NETHERLANDS B.V.
- Gerben PIETERSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE M...
- Publication number 20170363948
- Publication date Dec 21, 2017
- Cornelius Maria ROPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242348
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170219939
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...
- Publication number 20170108781
- Publication date Apr 20, 2017
- ASML NETHERLANDS B.V.
- Aart Adrianus VAN BEUZEKOM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20160179015
- Publication date Jun 23, 2016
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140098353
- Publication date Apr 10, 2014
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20130149649
- Publication date Jun 13, 2013
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20130050665
- Publication date Feb 28, 2013
- ASML NETHERLANDS B.V.
- Ivo Adam Johannes Thomas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
- Publication number 20130045447
- Publication date Feb 21, 2013
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS MANIFOLD, MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APP...
- Publication number 20120092631
- Publication date Apr 19, 2012
- ASML NETHERLANDS B.V.
- Frank Johannes Jacobus VAN BOXTEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
- Publication number 20110292357
- Publication date Dec 1, 2011
- ASML NETHERLANDS B.V.
- Ronald Van Der Ham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Assembly Comprising a Conditioning System and at Least One Object,...
- Publication number 20110188049
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Ronald VAN DER HAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20110005603
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Hrishikesh Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20100231875
- Publication date Sep 16, 2010
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100110410
- Publication date May 6, 2010
- ASML NETHERLANDS B.V.
- KOEN STEFFENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090237632
- Publication date Sep 24, 2009
- ASML NETHERLANDS B.V.
- Daniel Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090168037
- Publication date Jul 2, 2009
- ASML NETHERLANDS B.V.
- Roger Johannes Maria Hubertus Kroonen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090168032
- Publication date Jul 2, 2009
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090161083
- Publication date Jun 25, 2009
- ASML NETHERLANDS B.V.
- Sjoerd Nicolaas Lambertus Donders
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090147227
- Publication date Jun 11, 2009
- ASML NETHERLANDS B.V.
- Koen Steffens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having parts with a coated film adhered thereto
- Publication number 20080316441
- Publication date Dec 25, 2008
- ASML Netherland B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method for conditioning an interior spac...
- Publication number 20070071889
- Publication date Mar 29, 2007
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ronald Van Der Ham

Person

Patents Grantslast 30 patents

Fluid handling system and lithographic apparatus

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus, method of transferring a substrate and devi...

Fluid handling structure, a lithographic apparatus and a device man...

Fluid handling structure, a lithographic apparatus and a device man...

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus, method of transferring a substrate and devi...

Lithographic apparatus and a method of manufacturing a lithographic...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a device manufacturing method

Immersion lithographic apparatus and device manufacturing method

Fluid handling structure, a lithographic apparatus and a device man...

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Fluid handling structure, a lithographic apparatus and a device man...

Lithographic apparatus and device manufacturing method

Gas manifold, module for a lithographic apparatus, lithographic app...

Lithographic apparatus and device manufacturing method

Fluid handling structure, lithographic apparatus and device manufac...

Assembly comprising a conditioning system and at least one object,...

Lithographic apparatus and device manufacturing method

Immersion lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Assembly comprising a conditioning system and at least one object,...

Lithographic apparatus and method for conditioning an interior spac...

Lithographic apparatus having parts with a coated film adhered thereto

Gas shower, lithographic apparatus and use of a gas shower

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS

FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...

Lithographic apparatus, support table for a lithographic apparatus...

LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...

A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE M...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...

GAS MANIFOLD, MODULE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APP...

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...

Assembly Comprising a Conditioning System and at Least One Object,...

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus having parts with a coated film adhered thereto

Lithographic apparatus and method for conditioning an interior spac...