Ronald Wilklow

Person

Fairfield, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic clamp, lithographic apparatus and method of manufactu...
- Patent number 9,348,236
- Issue date May 24, 2016
- ASML Holding N.V.
- Peter Richard Helmus
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic clamp, lithographic apparatus and method of manufactu...
- Patent number 8,902,562
- Issue date Dec 2, 2014
- ASML Holdings N.V.
- Peter Richard Helmus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method involving fl...
- Patent number 8,755,027
- Issue date Jun 17, 2014
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV reticle substrates with high thermal conductivity
- Patent number 8,736,810
- Issue date May 27, 2014
- ASML Holding N.V.
- Ronald A. Wilklow
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thin film continuous spatially modulated grey attenuators and filters
- Patent number 8,558,988
- Issue date Oct 15, 2013
- ASML Holding N.V.
- Yuli Vladimirsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,027,026
- Issue date Sep 27, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam characterization monitor for sensing pointing or angle of an o...
- Patent number 8,013,999
- Issue date Sep 6, 2011
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,894,040
- Issue date Feb 22, 2011
- ASML Netherlands B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Layered structure for a tile wave plate assembly
- Patent number 7,548,370
- Issue date Jun 16, 2009
- ASML Holding N.V.
- Michael M. Albert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ultraviolet polarization beam splitter with minimum apodization
- Patent number 7,414,785
- Issue date Aug 19, 2008
- ASML Holding N.V.
- Ronald A Wilklow
- G02 - OPTICS
Information Patent Grant
Method to modify the spatial response of a pattern generator
- Patent number 7,335,398
- Issue date Feb 26, 2008
- ASML Holding N.V.
- Matthew Lipson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for protection of adhesives used to secure optics from ultra...
- Patent number 7,081,278
- Issue date Jul 25, 2006
- ASML Holdings N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Grant
Polarization beam splitter for photolithography
- Patent number 6,680,794
- Issue date Jan 20, 2004
- ASML Holding N.V.
- James A. McClay
- G02 - OPTICS
Information Patent Grant
Ultraviolet polarization beam splitter for microlithography
- Patent number 6,480,330
- Issue date Nov 12, 2002
- Silicon Valley Group, Inc.
- James A. McClay
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Beam Pointing Monitor and Compensation Systems
- Publication number 20200278295
- Publication date Sep 3, 2020
- ASML Holding N.V.
- Matthew E. HANSEN
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...
- Publication number 20130308116
- Publication date Nov 21, 2013
- ASML Holding N.V.
- Peter Richard Helmus
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...
- Publication number 20130033690
- Publication date Feb 7, 2013
- ASML Holding N.V.
- Peter Richard HELMUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110317138
- Publication date Dec 29, 2011
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110134402
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV Reticle Substrates With High Thermal Conductivity
- Publication number 20110116068
- Publication date May 19, 2011
- EUV RETICLE SUBSTRATES WITH HIGH THERMAL CONDUCTIV
- Ronald A. Wilklow
- B82 - NANO-TECHNOLOGY
Information Patent Application
Beam Characterization Monitor for Sensing Pointing or Angle of an O...
- Publication number 20090161088
- Publication date Jun 25, 2009
- ASML Holding N.V.
- Matthew E. Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thin Film Continuous Spatially Modulated Grey Attenuators and Filters
- Publication number 20090122289
- Publication date May 14, 2009
- ASML Holding N.V.
- Yuli VLADIMIRSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ultraviolet Polarization Beam Splitter with Minimum Apodization
- Publication number 20080278813
- Publication date Nov 13, 2008
- ASML Holding N.V.
- Ronald A. Wilklow
- G02 - OPTICS
Information Patent Application
Apparatus to Modify the Spatial Response of a Pattern Generator
- Publication number 20080017106
- Publication date Jan 24, 2008
- ASML Holding N.V.
- Matthew Lipson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming a Diffractive Optical Element
- Publication number 20070183046
- Publication date Aug 9, 2007
- ASML Holding N.V.
- Ronald Wilklow
- G02 - OPTICS
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060072088
- Publication date Apr 6, 2006
- ASML NETHERLANDS B.V.
- Matthew Lipson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ultraviolet polarization beam splitter with minimum apodization
- Publication number 20060018011
- Publication date Jan 26, 2006
- ASML Holding N.V.
- Ronald A. Wilklow
- G02 - OPTICS
Information Patent Application
System and method to modify the spatial response of a pattern gener...
- Publication number 20060019030
- Publication date Jan 26, 2006
- ASML Holding N.V.
- Matthew Lipson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layered structure for mosaic tile wave plate
- Publication number 20050286038
- Publication date Dec 29, 2005
- ASML Holding N.V.
- Michael M. Albert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Diffractive optical element
- Publication number 20050157391
- Publication date Jul 21, 2005
- ASML Holding N.V.
- Ronald Wilklow
- G02 - OPTICS
Information Patent Application
Diffractive optical element and method of making same
- Publication number 20050018296
- Publication date Jan 27, 2005
- ASML Holding N.V.
- Ronald Wilklow
- G02 - OPTICS
Information Patent Application
Ultraviolet polarization beam splitter with minimum apodization
- Publication number 20040252369
- Publication date Dec 16, 2004
- ASML Holding N.V.
- Ronald A. Wilklow
- G02 - OPTICS
Information Patent Application
Method for protection of adhesives used to secure optics from ultra...
- Publication number 20040058061
- Publication date Mar 25, 2004
- ASML US, Inc.
- Matthew Lipson
- G02 - OPTICS
Information Patent Application
Polarization beam splitter for photolithography
- Publication number 20030086158
- Publication date May 8, 2003
- Silicon Valley Group, Inc.
- James A. McClay
- G02 - OPTICS

Ronald Wilklow

Person

Patents Grantslast 30 patents

Electrostatic clamp, lithographic apparatus and method of manufactu...

Electrostatic clamp, lithographic apparatus and method of manufactu...

Lithographic apparatus and device manufacturing method involving fl...

EUV reticle substrates with high thermal conductivity

Thin film continuous spatially modulated grey attenuators and filters

Lithographic apparatus and device manufacturing method

Beam characterization monitor for sensing pointing or angle of an o...

Lithographic apparatus and device manufacturing method

Layered structure for a tile wave plate assembly

Ultraviolet polarization beam splitter with minimum apodization

Method to modify the spatial response of a pattern generator

Method for protection of adhesives used to secure optics from ultra...

Polarization beam splitter for photolithography

Ultraviolet polarization beam splitter for microlithography

Patents Applicationslast 30 patents

Beam Pointing Monitor and Compensation Systems

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTU...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

EUV Reticle Substrates With High Thermal Conductivity

Beam Characterization Monitor for Sensing Pointing or Angle of an O...

Thin Film Continuous Spatially Modulated Grey Attenuators and Filters

Ultraviolet Polarization Beam Splitter with Minimum Apodization

Apparatus to Modify the Spatial Response of a Pattern Generator

Method of Forming a Diffractive Optical Element

Lithographic apparatus and device manufacturing method

Ultraviolet polarization beam splitter with minimum apodization

System and method to modify the spatial response of a pattern gener...

Layered structure for mosaic tile wave plate

Diffractive optical element

Diffractive optical element and method of making same

Ultraviolet polarization beam splitter with minimum apodization

Method for protection of adhesives used to secure optics from ultra...

Polarization beam splitter for photolithography