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Ronaldus J.C.M. Kok
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Eindhoven, NL
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Patent Grant
Sputtering method in multi-chambered device
Patent number
6,113,749
Issue date
Sep 5, 2000
ODME International B.V.
Ronaldus J.C.M. Kok
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...