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Patents Grants
last 30 patents
Information
Patent Grant
Vertical motion protection method and device based on dual-stage mo...
Patent number
12,169,367
Issue date
Dec 17, 2024
Tsinghua University
Kaiming Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser interference photolithography system
Patent number
12,038,690
Issue date
Jul 16, 2024
Tsinghua University
Leijie Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plane grating calibration system
Patent number
11,940,349
Issue date
Mar 26, 2024
Tsinghua University
Leijie Wang
G01 - MEASURING TESTING
Information
Patent Grant
Five-degree-of-freedom heterodyne grating interferometry system
Patent number
11,703,361
Issue date
Jul 18, 2023
BEIJING U-PRECISION TECH CO., LTD.
Ming Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determining text color
Patent number
11,481,927
Issue date
Oct 25, 2022
Beijing Baidu Netcom Science and Technology Co., Ltd
Ziyan Zhong
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Two-degree-of-freedom heterodyne grating interferometry measurement...
Patent number
11,307,018
Issue date
Apr 19, 2022
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for generating customized visualization component
Patent number
11,132,114
Issue date
Sep 28, 2021
Beijing Baidu Netcom Science and Technology Co., Ltd
Rong Cheng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for calibrating an error of installation of an interferomete...
Patent number
11,022,423
Issue date
Jun 1, 2021
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Magnetic-fluid momentum sphere
Patent number
10,597,172
Issue date
Mar 24, 2020
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Magnetic levitation reaction sphere
Patent number
10,532,832
Issue date
Jan 14, 2020
Tsinghua University
Ming Zhang
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Six-degree-of-freedom displacement measurement method for exposure...
Patent number
9,995,569
Issue date
Jun 12, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Three-DOF heterodyne grating interferometer displacement measuremen...
Patent number
9,903,704
Issue date
Feb 27, 2018
Tsinghua University
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
Patent number
9,904,183
Issue date
Feb 27, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical grating phase modulator for laser interference photoetching...
Patent number
9,869,857
Issue date
Jan 16, 2018
Tsinghua University
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
Patent number
9,791,789
Issue date
Oct 17, 2017
Tsinghua University
Ming Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative stiffness system for gravity compensation of micropositioner
Patent number
9,752,643
Issue date
Sep 5, 2017
Shanghai Micro Electronics Equipment Co., Ltd.
Yu Zhu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Single degree of freedom vibration isolating device of linear motor...
Patent number
9,310,797
Issue date
Apr 12, 2016
Tsinghua University
Kaiming Yang
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
Publication number
20240319619
Publication date
Sep 26, 2024
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
Publication number
20240264534
Publication date
Aug 8, 2024
TSINGHUA UNIVERSITY
Leijie WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
Publication number
20240061352
Publication date
Feb 22, 2024
TSINGHUA UNIVERSITY
Leijie WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER INTERFERENCE PHOTOLITHOGRAPHY SYSTEM
Publication number
20240053683
Publication date
Feb 15, 2024
Tsinghua University
Leijie WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HETERODYNE GRATING INTERFEROMETRY SYSTEM BASED ON SECONDARY DIFFRAC...
Publication number
20230366667
Publication date
Nov 16, 2023
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
VERTICAL MOTION PROTECTION METHOD AND DEVICE BASED ON DUAL-STAGE MO...
Publication number
20230359132
Publication date
Nov 9, 2023
TSINGHUA UNIVERSITY
Kaiming YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE AND METHOD FOR REGULATING AND CONTROLLING INCIDENT ANGLE OF...
Publication number
20230280658
Publication date
Sep 7, 2023
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING
Information
Patent Application
PLANE GRATING CALIBRATION SYSTEM
Publication number
20220260452
Publication date
Aug 18, 2022
TSINGHUA UNIVERSITY
Leijie WANG
G01 - MEASURING TESTING
Information
Patent Application
HIGH-RESOLUTION PHASE DETECTION METHOD AND SYSTEM BASED ON PLANE GR...
Publication number
20220196383
Publication date
Jun 23, 2022
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
SEAL GASKET FOR FLAT PLATE STRUCTURE AND SEALING STRUCTURE THEREOF
Publication number
20220025972
Publication date
Jan 27, 2022
TSINGHUA UNIVERSITY
Rong CHENG
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
METHOD AND APPARATUS FOR GENERATING CUSTOMIZED VISUALIZATION COMPONENT
Publication number
20210333984
Publication date
Oct 28, 2021
Beijing Baidu Netcom Science and Technology CO., Ltd.
Rong CHENG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FIVE-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY SYSTEM
Publication number
20210262834
Publication date
Aug 26, 2021
TSINGHUA UNIVERSITY
Ming ZHANG
G01 - MEASURING TESTING
Information
Patent Application
TWO-DEGREE-OF-FREEDOM HETERODYNE GRATING INTERFEROMETRY MEASUREMENT...
Publication number
20210164772
Publication date
Jun 3, 2021
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
A METHOD FOR CALIBRATING AN ERROR OF INSTALLATION OF AN INTERFEROME...
Publication number
20210033383
Publication date
Feb 4, 2021
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING TEXT COLOR
Publication number
20200410718
Publication date
Dec 31, 2020
Beijing Baidu Netcom Science and Technology CO., Ltd.
Ziyan ZHONG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR GENERATING CUSTOMIZED VISUALIZATION COMPONENT
Publication number
20200057550
Publication date
Feb 20, 2020
Beijing Baidu Netcom Science and Technology CO., Ltd.
Rong CHENG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MAGNETIC-FLUID MOMENTUM SPHERE
Publication number
20180273212
Publication date
Sep 27, 2018
TSINGHUA UNIVERSITY
Yu ZHU
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Application
MAGNETIC LEVITATION REACTION SPHERE
Publication number
20180170581
Publication date
Jun 21, 2018
TSINGHUA UNIVERSITY
Ming ZHANG
G05 - CONTROLLING REGULATING
Information
Patent Application
SIX-DEGREE-OF-FREEDOM DISPLACEMENT MEASUREMENT METHOD FOR EXPOSURE...
Publication number
20180080757
Publication date
Mar 22, 2018
TSINGHUA UNIVERSITY
Yu Zhu
G01 - MEASURING TESTING
Information
Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
Publication number
20170115580
Publication date
Apr 27, 2017
TSINGHUA UNIVERSITY
Yu ZHU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RET...
Publication number
20170052461
Publication date
Feb 23, 2017
TSINGHUA UNIVERSITY
Ming ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMEN...
Publication number
20160153764
Publication date
Jun 2, 2016
TSINGHUA UNIVERSITY
Yu ZHU
G01 - MEASURING TESTING
Information
Patent Application
TWO-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT...
Publication number
20160138903
Publication date
May 19, 2016
TSINGHUA UNIVERSITY
Ming ZHANG
G01 - MEASURING TESTING
Information
Patent Application
NEGATIVE STIFFNESS SYSTEM FOR GRAVITY COMPENSATION OF MICROPOSITIONER
Publication number
20150369331
Publication date
Dec 24, 2015
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Yu ZHU
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING...
Publication number
20150362723
Publication date
Dec 17, 2015
TSINGHUA UNIVERSITY
Yu Zhu
G02 - OPTICS
Information
Patent Application
MAGLEV WORKPIECE TABLE WITH SIX DEGREES OF FREEDOM
Publication number
20150326150
Publication date
Nov 12, 2015
TSINGHUA UNIVERSITY
Yu ZHU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SINGLE DEGREE OF FREEDOM VIBRATION ISOLATING DEVICE OF LINEAR MOTOR...
Publication number
20150077032
Publication date
Mar 19, 2015
TSINGHUA UNIVERSITY
Kaiming Yang
G05 - CONTROLLING REGULATING