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Kao-Hsiung Hsien, TW
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Patents Grants
last 30 patents
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Patent Grant
Slurry dilution system with an ultrasonic vibrator capable of in-si...
Patent number
6,604,849
Issue date
Aug 12, 2003
Taiwan Semiconductor Manufacturing Co., Ltd
Bih-Tiao Lin
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Slurry dilution system with an ultrasonic vibrator capable of in-si...
Publication number
20020048214
Publication date
Apr 25, 2002
Bih-Tiao Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL