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Roxanne M. Jenkins
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Sugar Land, TX, US
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last 30 patents
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Patent Grant
Compositions and antireflective coatings for photolithography
Patent number
9,011,591
Issue date
Apr 21, 2015
Dow Global Technologies LLC
Yuanqiao Rao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
COMPOSITIONS AND ANTIREFLECTIVE COATINGS FOR PHOTOLITHOGRAPHY
Publication number
20130071560
Publication date
Mar 21, 2013
Rohm and Haas Electronic Materials L.L.C.
Yuanqiao Rao
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC