Roy D. McGregor

Person

El Camino Village, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Erosion reduction for EUV laser produced plasma target sources
- Patent number 6,912,267
- Issue date Jun 28, 2005
- University of Central Florida Research Foundation
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet and filament target stabilizer for EUV source nozzles
- Patent number 6,864,497
- Issue date Mar 8, 2005
- University of Central Florida Research Foundation
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Low vapor pressure, low debris solid target for EUV production
- Patent number 6,835,944
- Issue date Dec 28, 2004
- University of Central Florida Research Foundation
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gasdynamically-controlled droplets as the target in a laser-plasma...
- Patent number 6,738,452
- Issue date May 18, 2004
- Northrop Grumman Corporation
- Roy D. McGregor
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shroud nozzle for gas jet control in an extreme ultraviolet light s...
- Patent number 6,661,018
- Issue date Dec 9, 2003
- Northrop Grumman Corporation
- Roy D. McGregor
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High temperature EUV source nozzle
- Patent number 6,657,213
- Issue date Dec 2, 2003
- Northrop Grumman Corporation
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liquid sprays as the target for a laser-plasma extreme ultraviolet...
- Patent number 6,324,256
- Issue date Nov 27, 2001
- TRW Inc.
- Roy D. McGregor
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Droplet and filament target stabilizer for EUV source nozzles
- Publication number 20040114720
- Publication date Jun 17, 2004
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Erosion reduction for EUV laser produced plasma target sources
- Publication number 20040086080
- Publication date May 6, 2004
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Low vapor pressure, low debris solid target for EUV production
- Publication number 20040071266
- Publication date Apr 15, 2004
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Gasdynamically-controlled droplets as the target in a laser-plasma...
- Publication number 20030223546
- Publication date Dec 4, 2003
- Roy D. McGregor
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
High temperature EUV source nozzle
- Publication number 20020162974
- Publication date Nov 7, 2002
- Rocco A. Orsini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Roy D. McGregor

Person

Patents Grantslast 30 patents

Erosion reduction for EUV laser produced plasma target sources

Droplet and filament target stabilizer for EUV source nozzles

Low vapor pressure, low debris solid target for EUV production

Gasdynamically-controlled droplets as the target in a laser-plasma...

Shroud nozzle for gas jet control in an extreme ultraviolet light s...

High temperature EUV source nozzle

Liquid sprays as the target for a laser-plasma extreme ultraviolet...

Patents Applicationslast 30 patents

Droplet and filament target stabilizer for EUV source nozzles

Erosion reduction for EUV laser produced plasma target sources

Low vapor pressure, low debris solid target for EUV production

Gasdynamically-controlled droplets as the target in a laser-plasma...

High temperature EUV source nozzle