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Roy Winston Pascal
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Union City, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Bowl, spin, rinse, and dry module, and method for loading a semicon...
Patent number
6,612,315
Issue date
Sep 2, 2003
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for rinsing the backside of a semiconductor wafer
Patent number
6,558,474
Issue date
May 6, 2003
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer scrubbing brush core
Patent number
6,543,084
Issue date
Apr 8, 2003
Lam Research Corporation
Tanlin Dickey
B08 - CLEANING
Information
Patent Grant
Method for controlling airflow on a backside of a semiconductor waf...
Patent number
6,505,417
Issue date
Jan 14, 2003
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hollow core spindle and spin, rinse, and dry module including the same
Patent number
6,497,241
Issue date
Dec 24, 2002
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nozzle for rinsing the backside of a semiconductor wafer
Patent number
6,434,775
Issue date
Aug 20, 2002
Lam Research Corporaton
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bowl for processing semiconductor wafers
Patent number
6,415,804
Issue date
Jul 9, 2002
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer scrubbing brush core
Patent number
6,240,588
Issue date
Jun 5, 2001
Lam Research Corporation
Tanlin Dickey
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR CONTROLLING AIRFLOW ON A BACKSIDE OF A SEMICONDUCTOR WAF...
Publication number
20020112371
Publication date
Aug 22, 2002
ROY WINSTON PASCAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bowl, spin, rinse, and dry module, and method for loading a semicon...
Publication number
20020096200
Publication date
Jul 25, 2002
Lam Research Corporation
Roy Winston Pascal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer scrubbing brush core
Publication number
20010022008
Publication date
Sep 20, 2001
Tanlin Dickey
H01 - BASIC ELECTRIC ELEMENTS