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LINE-END EXTENSION METHOD AND DEVICE
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Publication number 20240087896
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Publication date Mar 14, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Min HSIAO
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H01 - BASIC ELECTRIC ELEMENTS
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OPTICAL PROXIMITY CORRECTION AND PHOTOMASKS
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Publication number 20230384691
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20230367234
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PATTERN FIDELITY ENHANCEMENT
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Publication number 20230369047
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., LTD
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Yu-Tien Shen
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H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF MANUFACTURING PHOTO MASKS
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Publication number 20230205093
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Publication date Jun 29, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Ken-Hsien HSIEH
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G06 - COMPUTING CALCULATING COUNTING
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METHOD OF OPERATING SEMICONDUCTOR APPARATUS
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Publication number 20230152710
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Publication date May 18, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shih-Ming Chang
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF MASK DATA SYNTHESIS AND MASK MAKING
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Publication number 20220373878
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Publication date Nov 24, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Hsu-Ting HUANG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PHOTOLITHOGRAPHY METHOD AND APPARATUS
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Publication number 20220365438
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shinn-Sheng YU
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20220365452
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF PATTERNING
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Publication number 20220367201
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chin-Yuan TSENG
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H01 - BASIC ELECTRIC ELEMENTS