Ru-Liang Julian Lee

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Center gas feed apparatus for a high density plasma reactor
- Patent number 6,193,836
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Jon Mohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Center gas feed apparatus for a high density plasma reactor
- Patent number 6,027,606
- Issue date Feb 22, 2000
- Applied Materials, Inc.
- John Mohn
- H01 - BASIC ELECTRIC ELEMENTS