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Ruairidh MacCrimmon
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Arlington, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Gas cluster ion beam etching process for etching Si-containing, Ge-...
Patent number
9,324,567
Issue date
Apr 26, 2016
TEL Epion Inc.
Martin D. Tabat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas cluster ion beam etching process for metal-containing materials
Patent number
8,557,710
Issue date
Oct 15, 2013
TEL Epion Inc.
Yan Shao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas cluster ion beam etching process for Si-containing and Ge-conta...
Patent number
8,513,138
Issue date
Aug 20, 2013
TEL Epion Inc.
Yan Shao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas cluster ion beam etching process for achieving target etch proc...
Patent number
8,512,586
Issue date
Aug 20, 2013
TEL Epion Inc.
Martin D. Tabat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for adjusting beam dimension for high-gradient lo...
Patent number
8,298,432
Issue date
Oct 30, 2012
TEL Epion Inc.
Ruairidh MacCrimmon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for multi-pass correction of substrate defects
Patent number
8,293,126
Issue date
Oct 23, 2012
TEL Epion Inc.
Ruairidh MacCrimmon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for assigning a beam intensity profile to a g...
Patent number
7,564,024
Issue date
Jul 21, 2009
TEL Epion Inc.
Nicolaus J. Hofmeester
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
Publication number
20130309872
Publication date
Nov 21, 2013
TEL Epion Inc.
Martin D. Tabat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...
Publication number
20130196509
Publication date
Aug 1, 2013
TEL Epion Inc.
Martin D. Tabat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS
Publication number
20130059444
Publication date
Mar 7, 2013
TEL EPION, INC.
Yan SHAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...
Publication number
20130059445
Publication date
Mar 7, 2013
TEL EPION, INC.
Yan SHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
Publication number
20130059446
Publication date
Mar 7, 2013
TEL EPION, INC.
Martin D. TABAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR ADJUSTING BEAM DIMENSION FOR HIGH-GRADIENT LO...
Publication number
20090084672
Publication date
Apr 2, 2009
TOKYO ELECTRON LIMITED
Ruairidh MacCRIMMON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR MULTI-PASS CORRECTION OF SUBSTRATE DEFECTS
Publication number
20090084759
Publication date
Apr 2, 2009
TEL Epion Inc.
Ruairidh MacCRIMMON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR ASSIGNING A BEAM INTENSITY PROFILE TO A G...
Publication number
20090001282
Publication date
Jan 1, 2009
TOKYO ELECTRON LIMITED
Nicolaus J. Hofmeester
G01 - MEASURING TESTING