Membership
Tour
Register
Log in
Rubin Ye
Follow
Person
Shanghai, CN
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Lift pin assembly, an electrostatic chuck and a processing apparatu...
Patent number
11,626,314
Issue date
Apr 11, 2023
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature adjusting apparatus and method for a focus ring
Patent number
10,593,520
Issue date
Mar 17, 2020
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Lei Wu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
Publication number
20240071724
Publication date
Feb 29, 2024
Advanced Micro-Fabrication Equipment Inc. China
Rubin YE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK, METHOD OF MANUFACTURING ELECTROSTATIC CHUCK, A...
Publication number
20210118716
Publication date
Apr 22, 2021
Advanced Micro-Fabrication Equipment Inc. China
Rubin YE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR MATCHING IMPEDANCE OF PULSE RADIO FREQUENCY P...
Publication number
20200185196
Publication date
Jun 11, 2020
Advanced Micro-Fabrication Equipment Inc. China
Rubin YE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LIFT PIN ASSEMBLY, AN ELECTROSTATIC CHUCK AND A PROCESSING APPARATU...
Publication number
20200083087
Publication date
Mar 12, 2020
Advanced Micro-Fabrication Equipment Inc. China
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ADJUSTING APPARATUS AND METHOD FOR A FOCUS RING
Publication number
20170186590
Publication date
Jun 29, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Lei Wu
H01 - BASIC ELECTRIC ELEMENTS