Rudi Neuland

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Schoeten, DE

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Patents Grantslast 30 patents

Information Patent Grant
Irradiation device for deep x-ray lithography
- Patent number 5,515,410
- Issue date May 7, 1996
- Jenoptik Technologie GmbH
- Bernd Seher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY