Rudolf M. Boon

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic projection apparatus
- Patent number 6,721,035
- Issue date Apr 13, 2004
- ASML Netherlands B.V.
- Hubert M. Segers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate handler for use in lithographic projection apparatus
- Patent number 6,404,483
- Issue date Jun 11, 2002
- ASML Netherlands B.V.
- Hubert M. Segers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY