Rudolf Von Buenau

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Catadioptric projection objective
- Patent number 8,416,490
- Issue date Apr 9, 2013
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,208,198
- Issue date Jun 26, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,199,400
- Issue date Jun 12, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20100265572
- Publication date Oct 21, 2010
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20100253999
- Publication date Oct 7, 2010
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20100014153
- Publication date Jan 21, 2010
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080186567
- Publication date Aug 7, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
Catadioptric projection objective
- Publication number 20070236674
- Publication date Oct 11, 2007
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
Method of determining lens materials for a projection exposure appa...
- Publication number 20070195423
- Publication date Aug 23, 2007
- Vladimir Kamenov
- G02 - OPTICS
Information Patent Application
Projection method including pupillary filtering and a projection le...
- Publication number 20050146701
- Publication date Jul 7, 2005
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS