Rudolf Von Buenau

Person

Essingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Catadioptric projection objective with parallel, offset optical axes
- Patent number 9,772,478
- Issue date Sep 26, 2017
- Carl Zeiss SMT GmbH
- David Shafer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion catadioptric projection objective having two intermediate...
- Patent number 8,908,269
- Issue date Dec 9, 2014
- Carl Zeiss SMT GmbH
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective including an aspherized plate
- Patent number 8,804,234
- Issue date Aug 12, 2014
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,730,572
- Issue date May 20, 2014
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,355,201
- Issue date Jan 15, 2013
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,339,701
- Issue date Dec 25, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,289,619
- Issue date Oct 16, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 8,208,199
- Issue date Jun 26, 2012
- Carl Zeiss SMT GmbH
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 7,869,122
- Issue date Jan 11, 2011
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Grant
Projection method including pupillary filtering and a projection le...
- Patent number 7,791,711
- Issue date Sep 7, 2010
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 7,679,821
- Issue date Mar 16, 2010
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 7,672,047
- Issue date Mar 2, 2010
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 7,463,422
- Issue date Dec 9, 2008
- Carl Zeiss SMT AG
- Vladimir Kamenow
- G02 - OPTICS
Information Patent Grant
Catadioptric projection objective
- Patent number 7,385,756
- Issue date Jun 10, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Grant
Projection method including pupillary filtering and a projection le...
- Patent number 7,336,342
- Issue date Feb 26, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Projection method including pupillary filtering and a projection le...
- Patent number 7,277,157
- Issue date Oct 2, 2007
- Carl Zeis SMT AG
- Hubert Holderer
Information Patent Grant
Microlithographic illumination method and a projection lens for car...
- Patent number 7,031,069
- Issue date Apr 18, 2006
- Carl Zeiss SMT AG
- Toralf Gruner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Microlithographic illumination method and a projection lens for car...
- Patent number 6,728,043
- Issue date Apr 27, 2004
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Toralf Gruner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20180031815
- Publication date Feb 1, 2018
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20160274343
- Publication date Sep 22, 2016
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
- Publication number 20150226948
- Publication date Aug 13, 2015
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20150055214
- Publication date Feb 26, 2015
- Carl Zeiss SMT GMBH
- David R. Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...
- Publication number 20140376086
- Publication date Dec 25, 2014
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20140111787
- Publication date Apr 24, 2014
- David R. Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120274918
- Publication date Nov 1, 2012
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120274919
- Publication date Nov 1, 2012
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20120250147
- Publication date Oct 4, 2012
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20110235167
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20110211252
- Publication date Sep 1, 2011
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20090190208
- Publication date Jul 30, 2009
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080310014
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080297889
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080285121
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080212170
- Publication date Sep 4, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080151364
- Publication date Jun 26, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
- Publication number 20080151365
- Publication date Jun 26, 2008
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
PROJECTION METHOD INCLUDING PUPILLARY FILTERING AND A PROJECTION LE...
- Publication number 20080143984
- Publication date Jun 19, 2008
- Carl Zeiss SMT AG
- Hubert HOLDERER
- G02 - OPTICS
Information Patent Application
Catadioptric projection objective
- Publication number 20050190435
- Publication date Sep 1, 2005
- Carl Zeiss SMT AG
- David Shafer
- G02 - OPTICS
Information Patent Application
Microlithographic illumination method and a projection lens for car...
- Publication number 20050002111
- Publication date Jan 6, 2005
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic illumination method and a projection lens for car...
- Publication number 20020191288
- Publication date Dec 19, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Toralf Gruner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Rudolf Von Buenau

Person

Patents Grantslast 30 patents

Catadioptric projection objective with parallel, offset optical axes

Immersion catadioptric projection objective having two intermediate...

Catadioptric projection objective including an aspherized plate

Catadioptric projection objective

Catadioptric projection objective

Catadioptric projection objective

Catadioptric projection objective

Catadioptric projection objective

Catadioptric projection objective

Projection method including pupillary filtering and a projection le...

Catadioptric projection objective

Catadioptric projection objective

Projection exposure apparatus

Catadioptric projection objective

Projection method including pupillary filtering and a projection le...

Projection method including pupillary filtering and a projection le...

Microlithographic illumination method and a projection lens for car...

Microlithographic illumination method and a projection lens for car...

Patents Applicationslast 30 patents

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

CATADIOPTRIC PROJECTION OBJECTIVE

PROJECTION METHOD INCLUDING PUPILLARY FILTERING AND A PROJECTION LE...

Catadioptric projection objective

Microlithographic illumination method and a projection lens for car...

Microlithographic illumination method and a projection lens for car...