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Rudolf Von Buenau
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Essingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Catadioptric projection objective with parallel, offset optical axes
Patent number
9,772,478
Issue date
Sep 26, 2017
Carl Zeiss SMT GmbH
David Shafer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion catadioptric projection objective having two intermediate...
Patent number
8,908,269
Issue date
Dec 9, 2014
Carl Zeiss SMT GmbH
David R. Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective including an aspherized plate
Patent number
8,804,234
Issue date
Aug 12, 2014
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,730,572
Issue date
May 20, 2014
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,355,201
Issue date
Jan 15, 2013
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,339,701
Issue date
Dec 25, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,289,619
Issue date
Oct 16, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
8,208,199
Issue date
Jun 26, 2012
Carl Zeiss SMT GmbH
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
7,869,122
Issue date
Jan 11, 2011
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Grant
Projection method including pupillary filtering and a projection le...
Patent number
7,791,711
Issue date
Sep 7, 2010
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
7,679,821
Issue date
Mar 16, 2010
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
7,672,047
Issue date
Mar 2, 2010
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Grant
Projection exposure apparatus
Patent number
7,463,422
Issue date
Dec 9, 2008
Carl Zeiss SMT AG
Vladimir Kamenow
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective
Patent number
7,385,756
Issue date
Jun 10, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Grant
Projection method including pupillary filtering and a projection le...
Patent number
7,336,342
Issue date
Feb 26, 2008
Carl Zeiss SMT AG
Hubert Holderer
G02 - OPTICS
Information
Patent Grant
Projection method including pupillary filtering and a projection le...
Patent number
7,277,157
Issue date
Oct 2, 2007
Carl Zeis SMT AG
Hubert Holderer
Information
Patent Grant
Microlithographic illumination method and a projection lens for car...
Patent number
7,031,069
Issue date
Apr 18, 2006
Carl Zeiss SMT AG
Toralf Gruner
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Microlithographic illumination method and a projection lens for car...
Patent number
6,728,043
Issue date
Apr 27, 2004
Carl Zeiss Semiconductor Manufacturing Technologies AG
Toralf Gruner
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
Publication number
20180031815
Publication date
Feb 1, 2018
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20160274343
Publication date
Sep 22, 2016
Carl Zeiss SMT GMBH
David R. Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
Publication number
20150226948
Publication date
Aug 13, 2015
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20150055214
Publication date
Feb 26, 2015
Carl Zeiss SMT GMBH
David R. Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH TWO INTERMEDIATE IMAGES AND...
Publication number
20140376086
Publication date
Dec 25, 2014
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20140111787
Publication date
Apr 24, 2014
David R. Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20120274918
Publication date
Nov 1, 2012
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20120274919
Publication date
Nov 1, 2012
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20120250147
Publication date
Oct 4, 2012
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20110235167
Publication date
Sep 29, 2011
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20110211252
Publication date
Sep 1, 2011
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20090190208
Publication date
Jul 30, 2009
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080310014
Publication date
Dec 18, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080297889
Publication date
Dec 4, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080285121
Publication date
Nov 20, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080212170
Publication date
Sep 4, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080151364
Publication date
Jun 26, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20080151365
Publication date
Jun 26, 2008
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
PROJECTION METHOD INCLUDING PUPILLARY FILTERING AND A PROJECTION LE...
Publication number
20080143984
Publication date
Jun 19, 2008
Carl Zeiss SMT AG
Hubert HOLDERER
G02 - OPTICS
Information
Patent Application
Catadioptric projection objective
Publication number
20050190435
Publication date
Sep 1, 2005
Carl Zeiss SMT AG
David Shafer
G02 - OPTICS
Information
Patent Application
Microlithographic illumination method and a projection lens for car...
Publication number
20050002111
Publication date
Jan 6, 2005
Carl Zeiss SMT AG
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Microlithographic illumination method and a projection lens for car...
Publication number
20020191288
Publication date
Dec 19, 2002
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Toralf Gruner
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC