Rudolf Von Bunau

Person

Essiugen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure system as well as a process for compensating im...
- Patent number 6,784,977
- Issue date Aug 31, 2004
- Carl Zeiss Semiconductor Manufacturing Technologies AG
- Rudolf von Bünau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement
- Patent number 6,781,668
- Issue date Aug 24, 2004
- Carl-Zeiss-Stiftung
- Karl-Heinz Schuster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catadioptric objective comprising two intermediate images
- Patent number 6,600,608
- Issue date Jul 29, 2003
- Carl-Zeiss-Stiftung
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Projection exposure system
- Patent number 6,593,998
- Issue date Jul 15, 2003
- Carl Zeiss SMT AG
- Toralf Gruner
- G02 - OPTICS
Information Patent Grant
Optical system
- Patent number 6,583,850
- Issue date Jun 24, 2003
- Carl-Zeiss-Stiftung
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical systems and methods of compensating rotationally non-symmet...
- Patent number 6,522,392
- Issue date Feb 18, 2003
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement having improved temperature distribution within...
- Patent number 6,521,877
- Issue date Feb 18, 2003
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement
- Patent number 6,504,597
- Issue date Jan 7, 2003
- Carl-Zeiss-Stiftung
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Grant
Optical arrangement
- Patent number 6,466,382
- Issue date Oct 15, 2002
- Carl-Zeiss-Stiftung
- Werner Müller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection-microlithographic device
- Patent number 6,445,442
- Issue date Sep 3, 2002
- Carl-Zeiss-Stiftung
- Rudolf Von Bünau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT
- Publication number 20020126400
- Publication date Sep 12, 2002
- Wemer Muller-Rissmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure system
- Publication number 20020075466
- Publication date Jun 20, 2002
- Toralf Gruner
- G02 - OPTICS
Information Patent Application
Optical arrangement
- Publication number 20010019403
- Publication date Sep 6, 2001
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Application
Optical system
- Publication number 20010008440
- Publication date Jul 19, 2001
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical arrangement
- Publication number 20010006412
- Publication date Jul 5, 2001
- Schuster Karl-Heinz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Rudolf Von Bunau

Person

Patents Grantslast 30 patents

Projection exposure system as well as a process for compensating im...

Optical arrangement

Catadioptric objective comprising two intermediate images

Projection exposure system

Optical system

Optical systems and methods of compensating rotationally non-symmet...

Optical arrangement having improved temperature distribution within...

Optical arrangement

Optical arrangement

Projection-microlithographic device

Patents Applicationslast 30 patents

OPTICAL ARRANGEMENT

Projection exposure system

Optical arrangement

Optical system

Optical arrangement