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Ruey-Yong DENG
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Pingtung County, TW
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last 30 patents
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Patent Grant
Alignment device and method for aligning apertures in different plates
Patent number
8,172,635
Issue date
May 8, 2012
Taiwan Semiconductor Manufacturing Co., Ltd.
Jiunn-Nan Lin
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Implantation quality improvement by xenon/hydrogen dilution gas
Patent number
7,973,293
Issue date
Jul 5, 2011
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Peng Lin
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
IMPLANTATION QUALITY IMPROVEMENT BY XENON/HYDROGEN DILUTION GAS
Publication number
20100176306
Publication date
Jul 15, 2010
Taiwan Semiconductor Manufacturing Co., LTD
Yu-Peng LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alignment device and method for aligning apertures in different plates
Publication number
20070161320
Publication date
Jul 12, 2007
Taiwan Semiconductor Manufacturing Co., Ltd.
Jiunn-Nan Lin
H01 - BASIC ELECTRIC ELEMENTS