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Rui Miguel Duarte Rodrigues Nunes
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,846,887
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,340,532
Issue date
May 24, 2022
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20240160109
Publication date
May 16, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20240085796
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20220291591
Publication date
Sep 15, 2022
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20210141311
Publication date
May 13, 2021
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
Publication number
20210109452
Publication date
Apr 15, 2021
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY