Rui TAKAHASHI

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate and substrate processing apparatus
- Patent number 9,530,657
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Masafumi Urakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,337,056
- Issue date May 10, 2016
- Tokyo Electron Limited
- Rui Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150235862
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Rui TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150132967
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Masafumi URAKAWA
- H01 - BASIC ELECTRIC ELEMENTS