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Ruifang Shi
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Cupertino, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Database-driven cell-to-cell reticle inspection
Patent number
8,914,754
Issue date
Dec 16, 2014
KLA-Tencor Corporation
Carl Hess
G01 - MEASURING TESTING
Information
Patent Grant
Wafer plane detection of lithographically significant contamination...
Patent number
8,611,637
Issue date
Dec 17, 2013
KLA-Tencor Corporation
Ruifang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle defect inspection with model-based thin line approaches
Patent number
8,103,086
Issue date
Jan 24, 2012
KLA-Tencor Corporation
Ruifang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process window optical proximity correction
Patent number
7,493,590
Issue date
Feb 17, 2009
KLA-Tencor Technologies Corporation
Carl Hess
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Database-Driven Cell-to-Cell Reticle Inspection
Publication number
20130111417
Publication date
May 2, 2013
KLA-TENCOR CORPORATION
Carl Hess
G01 - MEASURING TESTING
Information
Patent Application
Wafer Plane Detection of Lithographically Significant Contamination...
Publication number
20110299758
Publication date
Dec 8, 2011
KLA-Tencor Corporation
Ruifang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RETICLE DEFECT INSPECTION WITH MODEL-BASED THIN LINE APPROACHES
Publication number
20110299759
Publication date
Dec 8, 2011
KLA-Tencor Corporation
Ruifang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY