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Rungthiwa Methaapanon
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Tualatin, OR, US
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Patents Grants
last 30 patents
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Patent Grant
Carrier ring structure and chamber systems including the same
Patent number
10,242,848
Issue date
Mar 26, 2019
Lam Research Corporation
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Carrier Ring Structure and Chamber Systems Including the Same
Publication number
20160172165
Publication date
Jun 16, 2016
LAM RESEARCH CORPORATION
Eli Jeon
H01 - BASIC ELECTRIC ELEMENTS