Russel M. Hudyma

Follow

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical imaging system with catoptric objective; broadband objectiv...
- Patent number 9,052,494
- Issue date Jun 9, 2015
- KLA-Tencor Technologies Corporation
- Shiow-Hwei Hwang
- G01 - MEASURING TESTING
Information Patent Grant
Reflective projection lens for EUV-photolithography
- Patent number 7,450,301
- Issue date Nov 11, 2008
- Carl Zeiss SMT AG
- Hans-Juergen Mann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Reflective projection lens for EUV-photolithography
- Publication number 20070171558
- Publication date Jul 26, 2007
- Carl Zeiss SMT AG
- Hans-Juergen Mann
- G02 - OPTICS