Russell M. Singleton

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electronic control of an automatic wafer inspection system
- Patent number 4,644,172
- Issue date Feb 17, 1987
- KLA Instruments Corporation
- Paul Sandland
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for automatic wafer inspection
- Patent number 4,618,938
- Issue date Oct 21, 1986
- KLA Instruments Corporation
- Paul Sandland
- G06 - COMPUTING CALCULATING COUNTING