Russell Martin

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for substrate cleaning including movement of substrate below...
- Patent number 8,900,374
- Issue date Dec 2, 2014
- Lam Research Corporation
- Cheng-Yu (Sean) Lin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Proximity head having a fluid resistor
- Patent number 8,900,400
- Issue date Dec 2, 2014
- Lam Research Corporation
- Arnold Kholodenko
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for substantially uniform fluid flow rates relative to a...
- Patent number 8,317,966
- Issue date Nov 27, 2012
- Lam Research Corporation
- Arnold Kholodenko
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Removing bubbles from a fluid flowing down through a plenum
- Patent number 8,291,921
- Issue date Oct 23, 2012
- Lam Research Corporation
- Encrico Magni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system for cleaning substrate
- Patent number 7,849,554
- Issue date Dec 14, 2010
- Lam Research Corporation
- Cheng-Yu (Sean) Lin
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
High power electrical connector for a laminated heater
- Patent number 7,699,634
- Issue date Apr 20, 2010
- Lam Research Corporation
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
RF ground switch for plasma processing system
- Patent number 7,393,432
- Issue date Jul 1, 2008
- Lam Research Corporation
- Rajinder Dhindsa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Proximity Head Having a Fluid Resistor
- Publication number 20130048765
- Publication date Feb 28, 2013
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Removing Bubbles from a Fluid Flowing Down Through a Plenum
- Publication number 20130042891
- Publication date Feb 21, 2013
- Enrico Magni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and System for Cleaning Substrate
- Publication number 20110048467
- Publication date Mar 3, 2011
- LAM RESEARCH CORPORATION
- Cheng-Yu (Sean) Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM FOR CLEANING SUBSTRATE
- Publication number 20100269285
- Publication date Oct 28, 2010
- Lam Research Corporation
- Cheng-Yu (Sean) Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVING BUBBLES FROM A FLUID FLOWING DOWN THROUGH A PLENUM
- Publication number 20100043822
- Publication date Feb 25, 2010
- Encrico Magni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A...
- Publication number 20100037922
- Publication date Feb 18, 2010
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Electrical Connector for a Laminated Heater
- Publication number 20080227323
- Publication date Sep 18, 2008
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RF ground switch for plasma processing system
- Publication number 20060065369
- Publication date Mar 30, 2006
- Rai Dhindsa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Russell Martin

Person

Patents Grantslast 30 patents

Method for substrate cleaning including movement of substrate below...

Proximity head having a fluid resistor

Apparatus for substantially uniform fluid flow rates relative to a...

Removing bubbles from a fluid flowing down through a plenum

Apparatus and system for cleaning substrate

High power electrical connector for a laminated heater

RF ground switch for plasma processing system

Patents Applicationslast 30 patents

Proximity Head Having a Fluid Resistor

Method for Removing Bubbles from a Fluid Flowing Down Through a Plenum

Apparatus and System for Cleaning Substrate

APPARATUS AND SYSTEM FOR CLEANING SUBSTRATE

REMOVING BUBBLES FROM A FLUID FLOWING DOWN THROUGH A PLENUM

APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A...

High Power Electrical Connector for a Laminated Heater

RF ground switch for plasma processing system