Russell T. Herrin

Person

Essex Junction, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,906,803
- Issue date Feb 2, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,414,646
- Issue date Sep 17, 2019
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,093,537
- Issue date Oct 9, 2018
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,890,039
- Issue date Feb 13, 2018
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,862,598
- Issue date Jan 9, 2018
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,815,690
- Issue date Nov 14, 2017
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,764,944
- Issue date Sep 19, 2017
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,493,343
- Issue date Nov 15, 2016
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 9,406,472
- Issue date Aug 2, 2016
- GLOBALFOUNDRIES Inc.
- Dinh Dang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned gate electrode diffusion barriers
- Patent number 9,397,174
- Issue date Jul 19, 2016
- GLOBALFOUNDRIES Inc.
- John J. Ellis-Monaghan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacture for micro-electro-mechanical system (MEMS)
- Patent number 9,330,856
- Issue date May 3, 2016
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 8,956,903
- Issue date Feb 17, 2015
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned gate electrode diffusion barriers
- Patent number 8,932,920
- Issue date Jan 13, 2015
- International Business Machines Corporation
- John J. Ellis-Monaghan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned emitter-base in advanced BiCMOS technology
- Patent number 8,916,952
- Issue date Dec 23, 2014
- International Business Machines Corporation
- Kevin K. Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffusion barrier for oppositely doped portions of gate conductor
- Patent number 8,796,130
- Issue date Aug 5, 2014
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure
- Patent number 8,796,058
- Issue date Aug 5, 2014
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned emitter-base in advanced BiCMOS technology
- Patent number 8,716,096
- Issue date May 6, 2014
- International Business Machines Corporation
- Kevin K. Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor structure with a sidewall-defined intrinsic base to extr...
- Patent number 8,673,726
- Issue date Mar 18, 2014
- International Business Machines Corporation
- David L. Harame
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor structure with a sidewall-defined intrinsic base to extr...
- Patent number 8,513,084
- Issue date Aug 20, 2013
- International Business Machines Corporation
- David L. Harame
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor structure with a sidewall-defined intrinsic base to extr...
- Patent number 8,405,186
- Issue date Mar 26, 2013
- International Business Machines Corporation
- Renata Camillo-Castillo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Through silicon via lithographic alignment and registration
- Patent number 8,039,356
- Issue date Oct 18, 2011
- International Business Machines Corporation
- Russell T. Herrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180319652
- Publication date Nov 8, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180057357
- Publication date Mar 1, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20180050903
- Publication date Feb 22, 2018
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160325982
- Publication date Nov 10, 2016
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160325983
- Publication date Nov 10, 2016
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160060099
- Publication date Mar 3, 2016
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160060107
- Publication date Mar 3, 2016
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20160055282
- Publication date Feb 25, 2016
- International Business Machines Corporation
- Russell T. HERRIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20150041932
- Publication date Feb 12, 2015
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-Aligned Gate Electrode Diffusion Barriers
- Publication number 20150035076
- Publication date Feb 5, 2015
- International Business Machines Corporation
- John J. Ellis-Monaghan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-Aligned Gate Electrode Diffusion Barriers
- Publication number 20140353759
- Publication date Dec 4, 2014
- International Business Machines Corporation
- John J. Ellis-Monaghan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED EMITTER-BASE IN ADVANCED BiCMOS TECHNOLOGY
- Publication number 20140131773
- Publication date May 15, 2014
- International Business Machines Corporation
- Kevin K. Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSION BARRIER FOR OPPOSITELY DOPED PORTIONS OF GATE CONDUCTOR
- Publication number 20130181293
- Publication date Jul 18, 2013
- International Business Machines Corporation
- Jeffrey P. Gambino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...
- Publication number 20130149832
- Publication date Jun 13, 2013
- International Business Machines Corporation
- David L. Harame
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED EMITTER-BASE IN ADVANCED BiCMOS TECHNOLOGY
- Publication number 20130146947
- Publication date Jun 13, 2013
- International Business Machines Corporation
- Kevin K. Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20130105920
- Publication date May 2, 2013
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20110315527
- Publication date Dec 29, 2011
- International Business Machines Corporation
- Dinh DANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20110316097
- Publication date Dec 29, 2011
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20110315528
- Publication date Dec 29, 2011
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...
- Publication number 20110312147
- Publication date Dec 22, 2011
- International Business Machines Corporation
- David L. Harame
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...
- Publication number 20110309471
- Publication date Dec 22, 2011
- International Business Machines Corporation
- Renata Camillo-Castillo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THROUGH SILICON VIA LITHOGRAPHIC ALIGNMENT AND REGISTRATION
- Publication number 20110177670
- Publication date Jul 21, 2011
- International Business Machines Corporaton
- Russell T. Herrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photomasks having sub-lithographic features to prevent undesired wa...
- Publication number 20110177435
- Publication date Jul 21, 2011
- International Business Machines Corporation
- Russell T. Herrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REMOVAL OF ETCHING PROCESS RESIDUAL IN SEMICONDUCTOR FABRICATION
- Publication number 20080174015
- Publication date Jul 24, 2008
- Russell Thomas Herrin
- H01 - BASIC ELECTRIC ELEMENTS

Russell T. Herrin

Person

Patents Grantslast 30 patents

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Self-aligned gate electrode diffusion barriers

Methods of manufacture for micro-electro-mechanical system (MEMS)

Planar cavity MEMS and related structures, methods of manufacture a...

Self-aligned gate electrode diffusion barriers

Self-aligned emitter-base in advanced BiCMOS technology

Diffusion barrier for oppositely doped portions of gate conductor

Semiconductor structure

Self-aligned emitter-base in advanced BiCMOS technology

Transistor structure with a sidewall-defined intrinsic base to extr...

Transistor structure with a sidewall-defined intrinsic base to extr...

Transistor structure with a sidewall-defined intrinsic base to extr...

Through silicon via lithographic alignment and registration

Patents Applicationslast 30 patents

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

Self-Aligned Gate Electrode Diffusion Barriers

Self-Aligned Gate Electrode Diffusion Barriers

SELF-ALIGNED EMITTER-BASE IN ADVANCED BiCMOS TECHNOLOGY

DIFFUSION BARRIER FOR OPPOSITELY DOPED PORTIONS OF GATE CONDUCTOR

TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...

SELF-ALIGNED EMITTER-BASE IN ADVANCED BiCMOS TECHNOLOGY

SEMICONDUCTOR STRUCTURE

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...

TRANSISTOR STRUCTURE WITH A SIDEWALL-DEFINED INTRINSIC BASE TO EXTR...

THROUGH SILICON VIA LITHOGRAPHIC ALIGNMENT AND REGISTRATION

Photomasks having sub-lithographic features to prevent undesired wa...

REMOVAL OF ETCHING PROCESS RESIDUAL IN SEMICONDUCTOR FABRICATION