Rutger Wevers

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Aachen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Mirror with a mirror carrier and projection exposure apparatus
- Patent number 8,831,170
- Issue date Sep 9, 2014
- Carl Zeiss SMT GmbH
- Rutger Wevers
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MIRROR WITH A MIRROR CARRIER AND PROJECTION EXPOSURE APPARATUS
- Publication number 20080144202
- Publication date Jun 19, 2008
- Carl Zeiss SMT AG
- Rutger Wevers
- G02 - OPTICS