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Ruth A. Hendrickson
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Lincoln, MA, US
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last 30 patents
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Patent Grant
Apparatus and method for transporting substrates
Patent number
6,257,827
Issue date
Jul 10, 2001
Brooks Automation Inc.
Ruth Ann Hendrickson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for heating or cooling wafers
Patent number
5,778,968
Issue date
Jul 14, 1998
Brooks Automation Inc.
Ruth Ann Hendrickson
C30 - CRYSTAL GROWTH
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Patent Grant
Articulated arm transfer device
Patent number
5,180,276
Issue date
Jan 19, 1993
Brooks Automation, Inc.
Ruth A. Hendrickson
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS