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Ruud Antonius Catharina Maria BEERENS
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Roggel, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,334,983
Issue date
Dec 18, 2012
ASML Netherlands B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and sensor calibration method
Patent number
7,999,912
Issue date
Aug 16, 2011
ASML Netherlands B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20120249987
Publication date
Oct 4, 2012
ASML NETHERLANDS B.V.
Johannes Petrus Martinus Bernardus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20120224161
Publication date
Sep 6, 2012
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC PROJECTION METHOD
Publication number
20120212715
Publication date
Aug 23, 2012
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND REMOVABLE MEMBER
Publication number
20120162621
Publication date
Jun 28, 2012
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria Beerens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus Having an Encoder Type Position Sensor System
Publication number
20120075613
Publication date
Mar 29, 2012
ASML NETHERLANDS B.V.
Peter Paul STEIJAERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION SENSOR AND LITHOGRAPHIC APPARATUS
Publication number
20110304839
Publication date
Dec 15, 2011
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria BEERENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT MOUNT FOR LITHOGRAPHIC APPARATUS
Publication number
20110205517
Publication date
Aug 25, 2011
ASML NETHERLANDS B.V.
Henricus Gerardus Tegenbosch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110085180
Publication date
Apr 14, 2011
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria Beerens
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100297561
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Ruud Antonius Catharina Maria BEERENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and sensor calibration method
Publication number
20080278702
Publication date
Nov 13, 2008
ASML NETHERLANDS B.V.
Engelbertus Antonius Fransiscus Van Der Pasch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY