Ruud Antonius Catharina Maria BEERENS

Person

Roggel, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support, lithographic apparatus, method for manipulating...
- Patent number 12,242,204
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser focussing module
- Patent number 12,007,693
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
- Patent number 10,061,213
- Issue date Aug 28, 2018
- ASML Netherlands B.V.
- Johannes Antonius Gerardus Akkermans
- G01 - MEASURING TESTING
Information Patent Grant
Sensor, object positioning system, lithographic apparatus and devic...
- Patent number 10,012,914
- Issue date Jul 3, 2018
- ASML Netherlands B.V.
- Johannes Antonius Gerardus Akkermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation collector, radiation source and lithographic apparatus
- Patent number 9,983,482
- Issue date May 29, 2018
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and lithographic apparatus comprising such stage system
- Patent number 9,785,060
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and displacemen...
- Patent number 9,575,416
- Issue date Feb 21, 2017
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,507,277
- Issue date Nov 29, 2016
- ASML Netherlands B.V.
- Wilhelmus Henricus Theodorus Maria Aangenent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,494,869
- Issue date Nov 15, 2016
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,410,796
- Issue date Aug 9, 2016
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G01 - MEASURING TESTING
Information Patent Grant
Positioning system, lithographic apparatus and device manufacturing...
- Patent number 9,383,659
- Issue date Jul 5, 2016
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with a deformation sensor
- Patent number 9,360,774
- Issue date Jun 7, 2016
- ASML Netherlands B.V.
- Johannes Hendrikus Maria Spruit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element mount for lithographic apparatus
- Patent number 9,335,641
- Issue date May 10, 2016
- ASML Netherlands B.V.
- Henricus Gerardus Tegenbosch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,207,547
- Issue date Dec 8, 2015
- ASML Netherlands B.V.
- Johannes Hendrikus Maria Spruit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and lithographic projection method
- Patent number 9,182,683
- Issue date Nov 10, 2015
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,141,003
- Issue date Sep 22, 2015
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,141,004
- Issue date Sep 22, 2015
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and removable member
- Patent number 8,976,335
- Issue date Mar 10, 2015
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having an encoder type position sensor system
- Patent number 8,836,913
- Issue date Sep 16, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having encoder type position sensor system
- Patent number 8,760,615
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensor and lithographic apparatus
- Patent number 8,736,815
- Issue date May 27, 2014
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having an encoder position sensor system
- Patent number 8,687,166
- Issue date Apr 1, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, METHOD FOR MANIPULATING...
- Publication number 20220390850
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVIC...
- Publication number 20170277042
- Publication date Sep 28, 2017
- ASML NETHERLANDS B.V.
- Johannes Antonius Gerardus AKKERMANS
- G01 - MEASURING TESTING
Information Patent Application
ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...
- Publication number 20160349628
- Publication date Dec 1, 2016
- ASML NETHERLANDS B.V.
- Arno Jan BLEEKER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Collector, Radiation Source and Lithographic Apparatus
- Publication number 20160026091
- Publication date Jan 28, 2016
- ASML NETHERLANDS B.V.
- Erik Roelof LOOPSTRA
- G02 - OPTICS
Information Patent Application
STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM
- Publication number 20150227060
- Publication date Aug 13, 2015
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria Beerens
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DISPLACEMEN...
- Publication number 20150212428
- Publication date Jul 30, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20150168852
- Publication date Jun 18, 2015
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria Beerens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140340666
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF SETTING UP A LITHOGRAPHIC APPARAT...
- Publication number 20140192337
- Publication date Jul 10, 2014
- ASML NETHERLANDS B.V.
- Arno Jan Bleeker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130335722
- Publication date Dec 19, 2013
- ASML NETHERLANDS B.V.
- Wilhelmus Henricus Theodorus Maria Aangenent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus With a Deformation Sensor
- Publication number 20130162963
- Publication date Jun 27, 2013
- ASML NETHERLANDS B.V.
- Johannes Hendrikus Maria SPRUIT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20130162966
- Publication date Jun 27, 2013
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130077072
- Publication date Mar 28, 2013
- ASML NETHERLANDS B.V.
- Johannes Hendrikus Maria SPRUIT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having encoder type position sensor system
- Publication number 20090002653
- Publication date Jan 1, 2009
- ASML NETHERLANDS B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Ruud Antonius Catharina Maria BEERENS

Person

Patents Grantslast 30 patents

Substrate support, lithographic apparatus, method for manipulating...

Laser focussing module

Sensor, object positioning system, lithographic apparatus and devic...

Sensor, object positioning system, lithographic apparatus and devic...

Radiation collector, radiation source and lithographic apparatus

Stage system and lithographic apparatus comprising such stage system

Lithographic apparatus, device manufacturing method and displacemen...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Positioning system, lithographic apparatus and device manufacturing...

Lithographic apparatus with a deformation sensor

Optical element mount for lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and lithographic projection method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus and removable member

Lithographic apparatus having an encoder type position sensor system

Lithographic apparatus having encoder type position sensor system

Position sensor and lithographic apparatus

Lithographic apparatus having an encoder position sensor system

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT, LITHOGRAPHIC APPARATUS, METHOD FOR MANIPULATING...

LASER FOCUSSING MODULE

SENSOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVIC...

ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD...

Radiation Collector, Radiation Source and Lithographic Apparatus

STAGE SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SUCH STAGE SYSTEM

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DISPLACEMEN...

POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, METHOD OF SETTING UP A LITHOGRAPHIC APPARAT...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic Apparatus With a Deformation Sensor

Lithographic Apparatus and Method

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus having encoder type position sensor system