Ruud Antonius Catharina Maria Beerens

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Roggel, NL

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Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus having encoder type position sensor system
- Publication number 20080291413
- Publication date Nov 27, 2008
- ASML NETHERLANDS B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY