Ruzhan LU

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon wafer pre-alignment device and method therefor
- Patent number 10,276,418
- Issue date Apr 30, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Weiwang Sun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Silicon Wafer Pre-alignment Device and Method Therefor
- Publication number 20160329229
- Publication date Nov 10, 2016
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Weiwang SUN
- H01 - BASIC ELECTRIC ELEMENTS